Guang Qian, Bin Niu, Wu Zhao, Qiang Kan, Xiaowen Gu, Fengjie Zhou, Yuechan Kong, Tangsheng Chen, "CL-TWE Mach–Zehnder electro-optic modulator based on InP-MQW optical waveguides," Chin. Opt. Lett. 17, 061301 (2019)
- Chinese Optics Letters
- Vol. 17, Issue 6, 061301 (2019)
Fig. 1. Schematic diagram of the CL-TWE MZM based on InP-MQW optical waveguides.
Fig. 2. Calculated effective refractive index of the InP-MQW optical waveguide for
Fig. 3. Schematic process flow of the fabrication of CL-TWE EO MZM based on InP-MQW optical waveguides.
Fig. 4. Photographs of the fabricated 3 in. CL-TWE MZM chip and a single MZM chip based on InP-MQW optical waveguides.
Fig. 5. 45° SEM view of an InP-MQW optical waveguide etched to the n-InP layer without the following processes. Inset: the measured light spot of the InP-MQW optical waveguide.
Fig. 6. Measured
Fig. 7. EO response of the InP-MQW EO MZM.
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