Wentao Zhang, Yueyue Yang, Yuting Zhang, Ping Wu, Xianming Xiong, Hao Du. Detection of Rotation Angle of Reflective Grating Based on Interference Method[J]. Laser & Optoelectronics Progress, 2019, 56(11): 110501
- Laser & Optoelectronics Progress
- Vol. 56, Issue 11, 110501 (2019)
Fig. 1. Optical path for detection of grating rotation angle
Fig. 2. Schematic of diffraction beam change when grating rotating around y-axis
Fig. 3. Schematic of diffraction beam change when grating rotating is around x-axis
Fig. 4. Schematic of diffraction beam change when grating rotating is around z-axis
Fig. 5. Simulation results of model. (a) Interference patterns by simulation; (b) result of wavefront reconstruction; (c) relationship between grating rotation angle and diffraction beam deflection angle
Fig. 6. Experimental setup for grating rotation angle measurement
Fig. 7. Experimental results of grating rotation angle measurement. (a) Rotating around x-axis; (b) rotating around z-axis
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Table 1. Coefficients of Δθx at different pitch angles Δω of reflector
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Table 2. Coefficients of Δθx at different yaw angles Δη of reflector
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