Scanning probe microscopy (SPM) is a powerful tool for surface characterization. It could be used to represent three dimensional morphology and surface roughness, aperture size, distribution, so it can be applied to many scientific fields. The several recent scanning probe spectroscope characterization techniques are summarized, including scanning tunneling microscope(STM)、 atomic force microscope (AFM) and scanning near-field optical microscopy (SNOM), which could provide useful information concerning the structure and character of nanomaterials.