• Optics and Precision Engineering
  • Vol. 19, Issue 2, 380 (2011)
DAI Gang*, LU Jian, LIU Jian, ZHANG Liang, and NI Xiao-wu
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    DAI Gang, LU Jian, LIU Jian, ZHANG Liang, NI Xiao-wu. Experiment of long pulse high energy laser drilling on silica glass[J]. Optics and Precision Engineering, 2011, 19(2): 380 Copy Citation Text show less

    Abstract

    In order to improve the drilling efficiency of glass, a drilling hole method in the glass with a long pulse laser was investigated. ZrO2 was deposited onto the glass to increase the absorption at 1 064 nm. A cone shaped hole with a depth of 1.55 m was obtained by using a Nd∶YAG laser with a pulse duration of 1 ms. The efficiency of drilling holes were studied, which shows that the efficiency reaches the maximum value when the energy density equals 6.8 kJ/cm2.Then, the possible reasons were analyzed. The mechanisms of forming the cone shaped cavity were discussed by considering the property of absorption coefficient of glass that increases with the temperature. The cylindrical holes were obtained in the glass by adding absorption materials on both sides of the glass. Finally,the effects of thermal and optical properties of the absorption layer on the drilling holes were discussed to improve the drilling efficiency. The experiment results show that the single pulse ms laser can drill holes in glass by deposition absorption layers, which provides a new way for improving the drilling efficiency.
    DAI Gang, LU Jian, LIU Jian, ZHANG Liang, NI Xiao-wu. Experiment of long pulse high energy laser drilling on silica glass[J]. Optics and Precision Engineering, 2011, 19(2): 380
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