Jinhua ZHENG, Shiyang MEI, Zhixiong LI, Qingyun LIU. Effect of magnetic field and target-substrate distance on properties of CrAlN films[J]. Optics and Precision Engineering, 2023, 31(18): 2627

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- Optics and Precision Engineering
- Vol. 31, Issue 18, 2627 (2023)
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