• Optics and Precision Engineering
  • Vol. 28, Issue 7, 1433 (2020)
YIN Chang-shuai1,*, ZHOU Jian1, LIU Yi2, WU Jian-hui1..., XIONG Shuo1 and DUAN Hui-gao1|Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.37188/ope.20202807.1433 Cite this Article
    YIN Chang-shuai, ZHOU Jian, LIU Yi, WU Jian-hui, XIONG Shuo, DUAN Hui-gao. Research progress of surface acoustic wave ultraviolet detectors[J]. Optics and Precision Engineering, 2020, 28(7): 1433 Copy Citation Text show less

    Abstract

    Ultraviolet (UV) detectors based on the Surface Acoustic Wave (SAW) technology have become an active field of research owing to their advantages such as fast response, high sensitivity, simple fabrication, and wireless passive monitoring. In this study, the progress in the research of SAW UV detection, based on the classification of UV-sensitive films, was reviewed. The sensitive mechanism of SAW UV detection was analyzed and the characteristics, preparations, and UV performances of gallium nitride, doped gallium nitride, zinc oxide, doped zinc oxide, nanostructured zinc oxide, aluminum nitride, and other sensitive membrane materials were presented. This work also demonstrated the latest advancements in SAW UV sensors and their prospects in future development trends and challenges.
    YIN Chang-shuai, ZHOU Jian, LIU Yi, WU Jian-hui, XIONG Shuo, DUAN Hui-gao. Research progress of surface acoustic wave ultraviolet detectors[J]. Optics and Precision Engineering, 2020, 28(7): 1433
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