Confocal microscopy boasts such advantages as high contrast, high resolution and easy to 3D reconstruction. Therefore, the device has been widely applied in the manufacture and detection of biology and medical research, micro-machining, semiconductor and macromolecule. There are several kinds of confocal microscopy, including laser scanning confocal microscopy(LSCM), spinning-disk confocal microscopy (SDCM) and structured illumination microscopy (SIM). LSCM has such advantages as high contrast and resolution, but it is complicated, bulky, expensive and slow in imaging. SDCM can get the confocal image fast based on the lower resolution and more complicated technique. Though SIM is the simplest and cheapest confocal microscopy, it can offer high quality image with fast speed.