[1] LIU Yan,CAI Yao,ZHANG Yi,et al.Materials,design,and characteristics of bulk acoustic wave resonator:A review［J］.Micromachines,2020,11:630.

[2] KARTHIK P V,YADAV I,AJITHA B,et al.Advancements of uncooled infrared microbolometer materials:A review［J］.Sensors and Actuators:A,2022,342:113611.

[5] ZHAO Xiaolong,HUANG Danyang,PENG Wenbo,et al.Modeling of a ZnO single crystal bulk-acoustic-wave X-ray detector［J］.Sensor Actuators A,2022,343:113668.

[6] ZHAO Xiaolong,HUANG Danyang,PENG Wenbo,et al.Annealing effect on a (0001)-oriented ZnO single-crystal bulk-acoustic-wave X-ray detector［J］.IEEE Trans.Electron Devices,2022,69(3):1349-1352.

[8] HASHIMOTO K.RF bulk acoustic wave filters for communications［M］.Norwood,USA: Artech House,2009.

[10] PEREDA J A,VIELVA L A,VEGAS A,et al.Computation of resonant frequencies and quality factors of open dielectric resonators by a combination of the finite-difference time-domain (FDTD) and Prony’s methods［J］.IEEE Microwave Guided Wave Letters,1992,2:431-433.