• Optical Instruments
  • Vol. 37, Issue 2, 95 (2015)
FANG Chuanming* and CHEN Changjun
Author Affiliations
  • [in Chinese]
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    DOI: 10.3969/j.issn.1005-5630.2015.02.001 Cite this Article
    FANG Chuanming, CHEN Changjun. Straightness measurement of guide rail based on optical scanning method[J]. Optical Instruments, 2015, 37(2): 95 Copy Citation Text show less

    Abstract

    An online measurement method of straightness is studied based on multi-probe optical scanning method. A three-probe scanning method with tilt compensation is proposed. Reconstructed form can accurately express the high frequency elements of the straightness error, and owns better suppression capability of the measurement noise. The measurement principle of the proposed method is introduced firstly. The construction algorithm of the straightness errors is deduced based on the least square solution and the computer simulation is performed. The experimental system is built for verificating the validity of the proposed method. The experimental results show that the proposed method can accurately reconstruct the straightness errors of step form, and the standard deviation is less than 10 micrometer.
    FANG Chuanming, CHEN Changjun. Straightness measurement of guide rail based on optical scanning method[J]. Optical Instruments, 2015, 37(2): 95
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