Review of Anti-Vibration Technology in Phase-Shifting Interferometry

Liwei Zhang; Haobo Chen; Wenqing Sun; Jun Wang; Quanying Wu

doi:10.3788/LOP221473

Journals >Laser & Optoelectronics Progress >Volume 60 >Issue 19 >Page 1900005 > Article

Laser & Optoelectronics Progress
Vol. 60, Issue 19, 1900005 (2023)

Review of Anti-Vibration Technology in Phase-Shifting Interferometry

Liwei Zhang, Haobo Chen, Wenqing Sun^*, Jun Wang, and Quanying Wu

Author Affiliations

Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, Jiangsu , China

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DOI: 10.3788/LOP221473 Cite this Article Set citation alerts

Liwei Zhang, Haobo Chen, Wenqing Sun, Jun Wang, Quanying Wu. Review of Anti-Vibration Technology in Phase-Shifting Interferometry[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900005 Copy Citation Text

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Article index updated: Apr. 17, 2025

The article is cited by 7 article(s) CLP online library. (Some content might be in Chinese.)

Liwei Zhang, Haobo Chen, Wenqing Sun, Jun Wang, Quanying Wu. Review of Anti-Vibration Technology in Phase-Shifting Interferometry[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900005

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