• Acta Photonica Sinica
  • Vol. 40, Issue 9, 1381 (2011)
XIAO Xiao1,*, XIAO Zhi-gang1, XU De-fu1, DENG Chi1, and LIU Xiao-yun2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/gzxb20114009.1381 Cite this Article
    XIAO Xiao, XIAO Zhi-gang, XU De-fu, DENG Chi, LIU Xiao-yun. Surface Plasmon Polaritions Lithography Based on Thick Metallic Slit Arrays[J]. Acta Photonica Sinica, 2011, 40(9): 1381 Copy Citation Text show less
    References

    [1] SHI S, ZHANG Z Y, HE M Y, et al. Analysis of surface-plasmon-polaritons-sssisted interference imaging by using silver film with rough surface[J]. Optics Express, 2010, 18(10): 10685-10693.

    [2] HE M Y, ZHANG Z Y, SHI S, et al. A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique[J]. Optics Express, 2010, 18(15): 15975-15980.

    [3] WANG J Q, LIANG H M, NIU X Y, et al. Enhancing exposure depth for surface-plasmon polaritions interference nanolithography by waveguide modulation[J]. Journal of Applied Physics, 2010, 108(1): 014308-1-3.

    [4] NIU X Y, QI Y M, WANG J Q, et al. Approach of enhancing exposure depth for evanescent wave interference lithography[J]. Microelectronic Engineering,2010, 87(5-8): 1168-1171.

    [5] BETHE H A. Theory of diffraction by small holes[J]. Physical Review,1944, 66(7-8): 163-182.

    [6] GRUPP D E, LEZEC H J, EBBESEN T W, et al. Crucial role of metal surface in enhanced transmission through subwavelength apertures[J]. Applied Physics Letters, 2000, 77(11): 1569-1571.

    [7] CAO Q, LALANCE P. Negative role of surface plasmons in the transmission of metallic grating with very narrow slits[J]. Physical Review Letters, 2002, 88(5): 056403-1-4.

    [8] DEGIRON A, LEZEC H J, YAMAMOTO N. Optical transmission properties of a single subwavelength aperture in a real metal[J]. Optics Communications, 2004, 239(1-3): 61-66.

    [9] TAN W C, PREIST T W, SAMBLES R J. Resonant tunneling of light through thin metal films via strongly localized surface plasmons[J]. Physical Review B, 2000, 62(16):11134-11138.

    [10] MARTIN M L, GARCIA V F J, LEZEC H J, et al. Theory of extraordinary optical transmission through subwavelength hole arrays[J]. Physical Review Letters, 2001, 86(6): 1114-1117.

    [11] GARCIA N, NIETO V M. Theory of electromagnetic wave transmission through metallic gratings of subwavelength slits[J]. Journal of Optics A: Pure and Applied Optics, 2007, 9(5):490.

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    XIAO Xiao, XIAO Zhi-gang, XU De-fu, DENG Chi, LIU Xiao-yun. Surface Plasmon Polaritions Lithography Based on Thick Metallic Slit Arrays[J]. Acta Photonica Sinica, 2011, 40(9): 1381
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