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    Journals >Laser & Optoelectronics Progress >Volume 52 >Issue 1 >Page 13101 > Article
    • Laser & Optoelectronics Progress
    • Vol. 52, Issue 1, 13101 (2015)
    Study on the Properties of DLC Films with Si Doping Prepared by Rf-PECVD
    Yang Yongliang1,*, Yue Li1, Li Na1, and Tang Haolong2
    Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop52.013101 Cite this Article Set citation alerts
    Yang Yongliang, Yue Li, Li Na, Tang Haolong. Study on the Properties of DLC Films with Si Doping Prepared by Rf-PECVD[J]. Laser & Optoelectronics Progress, 2015, 52(1): 13101 Copy Citation Text show less
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    Article index updated: Mar. 25, 2025
    The article is cited by 2 article(s) CLP online library. (Some content might be in Chinese.)
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    Yang Yongliang, Yue Li, Li Na, Tang Haolong. Study on the Properties of DLC Films with Si Doping Prepared by Rf-PECVD[J]. Laser & Optoelectronics Progress, 2015, 52(1): 13101
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    Paper Information
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