In this study, dense and defect-free specimens of a single track are fabricated at a high deposition rate using the plasma arc deposition, in which the 316L stainless steel powder is used as the deposition material. The effects of the deposition current, scanning speed, and powder feeding rate on the deposition height, width, and angle of the specimens are studied. Moreover, the microstructure and composition of the deposited samples are examined and analyzed. The results indicate that the deposition angle increases with increase in the powder feeding rate and decreases with increase in the deposition current. The deposition angles of the specimens fabricated under different deposition parameters are mainly sharp angles, which is beneficial for the deposition of the lapped samples. Among all the process parameters, the width of the single track is mostly affected by the deposition current, while its height is mostly affected by the scanning speed. The dilution rate decreases under a higher scanning speed, lower deposition current, or higher powder feeding rate. The composition distribution of the deposition specimens is uniform. The solidified microstructure comprises austenite and ferrite phases.