Pengfei Wu, Hanying Liu, Sichen Lei. Optical Coupling Performance in Free Space Based on Grating-Type Optical Waveguide[J]. Laser & Optoelectronics Progress, 2024, 61(9): 0901003
- Laser & Optoelectronics Progress
- Vol. 61, Issue 9, 0901003 (2024)
Fig. 1. Schematic diagram of grating coupler. (a) Diagram of three-dimensional structure; (b) diagram of x-y cross section
Fig. 2. Light distribution. (a) In the free space; (b) in atmospheric turbulence
Fig. 3. Effect of grating period on coupling efficiency
Fig. 4. Effect of etching depth on coupling efficiency
Fig. 5. Effect of buried oxide thickness on coupling efficiency
Fig. 6. Electric field distribution of the grating coupler at 1550 nm. (a) Without DBR mirror; (b) with DBR mirror
Fig. 7. Comparison of grating coupling efficiency between without DBR mirror and with DBR mirror at different wavelengths
Fig. 8. Process tolerance analysis. (a) Effect of etching width on coupling efficiency; (b) effect of etching depth on coupling efficiency;(c) effect of tilt angle on coupling efficiency
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Table 1. Structural parameters of the incident grating coupler with distributed Bragg mirrors
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