Zhengjie WEI, Di ZHANG, Guanhao WU. Development of Miniature Optical Encoder for Precise Displacement Measurement[J]. Acta Photonica Sinica, 2021, 50(9): 0912001
- Acta Photonica Sinica
- Vol. 50, Issue 9, 0912001 (2021)
Fig. 1. Schematic diagram of double grating diffraction
Fig. 2. Schematic diagram of double grating interferometric scanning measurement system
Fig. 3. Schematic diagram of the diffraction efficiency of the dual grating system
Fig. 4. Curve of interference signal contrast of I 1 and diffraction efficiency r 1
Fig. 5. Physical image of grating element
Fig. 6. Reading head and measuring grating of grating displacement sensor
Fig. 7. Signal processing circuit board and its signal output
Fig. 8. Principle prototype of grating displacement sensor
Fig. 9. Sensor performance test experimental device
Fig. 10. Signal processing flow of sensor performance test
Fig. 11. Comparison of measurement results of grating encoder and capacitance sensor
Fig. 12. Displacement measurement stability of the sensor
Fig. 13. The output signal of the encoder at a speed of 10 mm/s
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Table 1. Displacement measurement results of grating encoder and capacitive sensor
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Table 2. Partial performance comparison between grating sensor and other systems
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