PIAO Linhua, ZHANG Yan, TONG Jiacheng, LI Bei. Study on the Sensitivity Mechanism of Thermal Oscillator Type Biaxial MEMS Angular Velocity Gyro[J]. Piezoelectrics & Acoustooptics, 2023, 45(3): 477

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- Piezoelectrics & Acoustooptics
- Vol. 45, Issue 3, 477 (2023)
Abstract

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