Jinfu SIMA, Leijie LAI, Pengzhi LI, Yu FANG, Limin ZHU. Coupled hysteresis model and its inverse compensation for three-degree-of-freedom tip-tilt-piston piezoelectric stage[J]. Optics and Precision Engineering, 2023, 31(20): 2964
- Optics and Precision Engineering
- Vol. 31, Issue 20, 2964 (2023)
Fig. 1. Experimental system of 3-DOFs tip-tilt-piston piezoelectric stage
Fig. 2. Relationship between 3-DOFs motion and output displacements of PZTs
Fig. 3. Coupled hysteresis characteristics when voltage is applied to PZT 1 separately
Fig. 4. Coupled hysteresis model
Fig. 5. Coupled hysteresis inverse model
Fig. 6. Identification results and errors of PI model
Fig. 7. Identification results of coupling parameters of PZT 2 to PZT 1
Fig. 8. PI inverse model identification results and errors
Fig. 9. Comparisons of hysteresis and coupling before and after open-loop compensation of the coupled hysteresis inverse model
Fig. 10. Compound control system with coupled hysteresis inverse model feedforward
Fig. 11. Comparison of ball trajectory tracking results and errors before and after compensation
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Table 1. Parameter identification results of PI model
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Table 2. Coupling parameter identification results
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Table 3. Root mean square error of coupling model and actual coupling
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Table 4. Parameter identification results of PI inverse model
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