• Optics and Precision Engineering
  • Vol. 32, Issue 14, 2200 (2024)
Hanlin HUO1, Jinsong WANG1,*, Guoming WANG2,3,*, Genzi LI4, and Weihu ZHOU2,3
Author Affiliations
  • 1School of Optoelectronic Engineering ,Changchun University of Science and Technology, Changchun30022,China
  • 2Institute of Microelectronics of the Chinese Academy of Sciences,Beijing100094,China
  • 3University of Chinese Academy of Sciences,Beijing100049,China
  • 4Yanqi Lake Institute of Basic Manufacturing Technology (Beijing) Co., Ltd., Beijing10107, China
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    DOI: 10.37188/OPE.20243214.2200 Cite this Article
    Hanlin HUO, Jinsong WANG, Guoming WANG, Genzi LI, Weihu ZHOU. Shafting design and dynamic deformation error correction of two-dimensional laser tracking turntable[J]. Optics and Precision Engineering, 2024, 32(14): 2200 Copy Citation Text show less

    Abstract

    The stability of shafting structure and the compensation accuracy of dynamic deformation error are the key factors for laser tracker to achieve high-precision dynamic coordinate measurement. To fulfill the stringent requirements of high precision and stability in dynamic coordinate measurement, a two-dimensional turntable based on an over-positioned double angular contact bearing shafting system has been developed. Initially, the design and precision analysis of the two-dimensional turntable shafting were conducted based on the performance specifications of the turntable. Subsequently, based on the designed structure, existing assembly techniques and the theory of elasticity, the mechanism of the dynamic deformation error of the turntable was analyzed, and the rationality of the theory was verified through rigid flexible coupling dynamics simulation. Finally, a method for measuring shafting dynamic errors based on the symmetric differential optical self-collimation principle was proposed to achieve the measurement and compensation of shafting stability and dynamic deformation errors. The two-dimensional laser tracking turntable, as a crucial component of laser trackers to achieve high-precision dynamic coordinate measurements. Experimental results demonstrate that the repeatability of the turntable's dynamic deformation error is superior to ±0.6″, and the dynamic deformation error has been reduced from ±7″ to ±1″ after compensation. The stability and dynamic deformation error compensation accuracy of the designed turntable meet the requirements.
    Hanlin HUO, Jinsong WANG, Guoming WANG, Genzi LI, Weihu ZHOU. Shafting design and dynamic deformation error correction of two-dimensional laser tracking turntable[J]. Optics and Precision Engineering, 2024, 32(14): 2200
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