Qiushi HUANG, Runze QI, Zhe ZHANG, Wenbin LI, Li JIANG, Yunxue ZHANG, Yeqi ZHUANG, Zhong ZHANG, Zhanshan WANG. Development of high performance and large size X-ray multilayer reflective optics[J]. Optics and Precision Engineering, 2022, 30(21): 2793
- Optics and Precision Engineering
- Vol. 30, Issue 21, 2793 (2022)
Fig. 1. Maximum reflectivity of ideal multilayers working at 8-12 nm wavelengths under near normal incidence
Fig. 2. Grazing incidence reflectivity results of Pd/Y multilayers at 8 keV
Fig. 3. Near-normal incidence reflectivity results measured at 8-10 nm wavelengths of Pd/Y multilayers
Fig. 4. Measured S-polarized reflectivity and fitted results of soft X-ray Cr/C multilayer polarizer
Fig. 5. Near-normal incidence reflectivity and fitted results of ultrathin Cr/C multilayers with large number of bilayers
Fig. 6. Cross-section TEM and electron diffraction measurement results
Fig. 7. Reflectivity measurement and simulation results in the water window region of Cr/C multilayers with no barrier layers and with B4C barrier layers
Fig. 8. Tender X-ray reflectivity measurement results of Cr/C multilayer
Fig. 9. X-ray reflectivity measurement and fitted results of Ru/C multilayers with different thickness
Fig. 10. Stress measurements results of Ru/B4C multilayers fabricated by different ratio of nitrogen
Fig. 11. X-ray reflectivity measurement and fitted results of Pd/B4C multilayers fabricated by Kr and Ar sputtering
Fig. 12. Review of experimental and theoretical peak reflectivity of multilayers working at different X-ray range， developed in IPOE （AOI： Angle of Incidence）
Fig. 13. Reflectance design results of broadband Pd/B4C multilayers with different bandwidths
Fig. 14. Results of W/Si periodic multilayer and broadband multilayer
Fig. 15. Measured d -spacing uniformity and reflectivity at different positions of W/Si multilayer mirror
Fig. 16. d -spacing uniformity of W/Si and Ru/C multilayers
Fig. 17. Pictures of double channel multilayer mirrors
Fig. 18. Schematic of multilayer coated blazed grating
Fig. 19. TEM images of Cr/C multilayer blazed grating with 2 400 l/mm line density
Fig. 20. Measured and simulation results of diffraction efficiency and reflectivity of Cr/C multilayer blazed grating and Au coated grating
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