[1] Huang T Y, Meng R Y, Zhao Q H et al. Modular full-polarization microscope[J]. Chinese Journal of Lasers, 48, 1517002(2021).
[2] Shi J H, Wang Z P, Guan C Y et al. Multi-wavelength metal-dielectric nonpolarizing beam splitters in the near-infrared range[J]. Optics & Laser Technology, 43, 515-518(2011).
[3] Shi J H, Zhu Z, Wang Z P et al. Theoretical design of a novel metal-dielectric non-polarizing beam splitter in the visible range[J]. Acta Optica Sinica, 31, s100303(2011).
[4] Cui J N, He Z Q, Tan J B et al. Realization of a robust homodyne quadrature laser interferometer by performing wave plate yawing to realize ultra-low error sensitivity[J]. Optics Express, 24, 23505-23518(2016).
[5] Tan Y D, Xu X, Zhang S L. Precision measurement and applications of laser interferometry[J]. Chinese Journal of Lasers, 48, 1504001(2021).
[6] Zhao C G, Tan J B, Liu T. Effect of asymmetrical transfer coefficients of a non-polarizing beam splitter on the nonlinear error of the polarization interferometer[J]. Optoelectronics Letters, 6, 371-375(2010).
[7] Wang Y, Chen H F. Nonlinear error compensation of laser heterodyne interference based on continuous wavelet transform[J]. Chinese Journal of Lasers, 49, 2104006(2022).
[8] Kang C, Wang Z P, Huang Z J et al. Influence of reflection-induced-retardance of non-polarizing beam splitter upon the polarization state of the output light of faraday mirror optical current transformer[J]. Acta Optica Sinica, 26, 1857-1860(2006).
[9] Hou W M, Zhang Y B, Xu Q X. Effect of beam splitter on nonlinearity in heterodyne interferometers[J]. Chinese Journal of Mechanical Engineering, 44, 163-168(2008).
[10] Deng Y L, Li X J, Geng Y F et al. Influence of nonpolarizing beam splitters on nonlinear error in heterodyne interferometers[J]. Acta Optica Sinica, 32, 1112008(2012).
[11] Wang Z P, Zhang S T, Hao Y Q. Theoretical investigation on temperature features of NPBS parameters and their influences on OCRCS[J]. Journal of Harbin Engineering University, 29, 98-101(2008).
[12] Li L Y, Wu B, Yuan Y G et al. Research on nonlinear error compensation method for single-frequency laser interferometer[J]. Acta Optica Sinica, 31, 0726003(2011).
[13] Zhan Q W, Leger J R. Microellipsometer with radial symmetry[J]. Applied Optics, 41, 4630-4637(2002).
[14] Li Z T, Zhao Y M, Li Z H et al. Design and analysis of phase delay of Porro prism and compensation wave-plate[J]. Chinese Journal of Lasers, 48, 2101004(2021).
[15] Zhu L L, Zeng A J, Li F Y et al. Real-time measurement method for retardation of eighth waveplate independent of fast axis[J]. Chinese Journal of Lasers, 38, 0508002(2011).
[16] Wang Z P, Li Q B, Tan Q et al. Method of measuring practical retardance value and judging the fast or slow axis of quarter-wave plate[J]. Chinese Journal of Lasers, 32, 523-528(2005).
[17] Deng Y L, Li X J, Geng Y F et al. Effect of nonpolarizing beam splitter on measurement error in heterodyne interferometric ellipsometers[J]. Measurement Science and Technology, 23, 085204(2012).
[18] Zhang B, Yan L P, Diao X F. Effect of alignment error of wave plate array on nonlinear error of laser interference[J]. Chinese Journal of Lasers, 49, 0904003(2022).
[19] Gao X D. Design of infrared non-polarizing anti-reflective film of 3-5 μm at variable incidence angle[J]. Laser & Optoelectronics Progress, 50, 033101(2013).
[20] Wang W L, Hao H G. Designs of near infrared two-waveband non-polarizing beam splitter[J]. Acta Optica Sinica, 31, 1131002(2011).
[21] Zhang P, Cui J J. Research progress in nonlinear error compensation suppression and measurement of heterodyne interferometer[J]. Laser & Optoelectronics Progress, 58, 1100003(2021).
