Numerical simulation has been performed to improve the performance of Cu2ZnSnS4 (CZTS) solar cells by replacing CdS with Zn1–xSnxO buffer layer. The influences of thickness, donor concentration and defect density of buffer layers on the performance of CZTS solar cells were investigated. It has been found that Zn1–xSnxO buffer layer for Sn content of 0.20 is better for CZTS solar cell. A higher efficiency can be achieved with thinner buffer layer. The optimized solar cell demonstrated a maximum power conversion efficiency of 13%.