• International Journal of Extreme Manufacturing
  • Vol. 4, Issue 2, 25301 (2022)
Yasuhiro Okamoto*, Tubasa Okubo, Atsuya Kajitani, and Akira Okada
Author Affiliations
  • Graduate School of Natural Science and Technology, Okayama University, Okayama, Japan
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    DOI: 10.1088/2631-7990/ac5a6a Cite this Article
    Yasuhiro Okamoto, Tubasa Okubo, Atsuya Kajitani, Akira Okada. High-quality micro-shape fabrication of monocrystalline diamond by nanosecond pulsed laser and acid cleaning[J]. International Journal of Extreme Manufacturing, 2022, 4(2): 25301 Copy Citation Text show less
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    [3] Umezawa H 2018 Recent advances in diamond power semiconductor devices Mater. Sci. Semicond. Process. 78 147-56

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    [5] Takayama N and Yan J W 2017 Mechanisms of micro-groove formation on single-crystal diamond by a nanosecond pulsed laser J. Mater. Process. Technol. 243 299-311

    [6] Breeding C M and Shigley J E 2009 The ‘type’ classification system of diamonds and its importance in gemology Gems Gemol. 45 96-111

    [7] Sumiya H, Toda N and Satoh S 2000 High-quality large diamond crystals New Diam. Front. Carbon Technol. 10 233-51

    [8] Rothschild M, Arnone C and Ehrlich D J 1986 Excimer-laser etching of diamond and hard carbon films by direct writing and optical projection J. Vac. Sci. Technol. B 4 310-4

    [9] Okamoto Y, Okada A, Kajitani A and Shinonaga T 2019 High surface quality micro machining of monocrystalline diamond by picosecond pulsed laser CIRP Ann. 68 197-200

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    [11] Takayama N and Yan J W 2017 Laser irradiation responses of a single-crystal diamond produced by different crystal growth methods Appl. Sci. 7 815

    [12] Shakhov F M, Abyzov A M, Kidalov S V, Krasilin A A, Lahderanta E, Lebedev V T, Shamshur D V and Takai K 2017 Boron-doped diamond synthesized at high-pressure and high-temperature with metal catalyst J. Phys. Chem. Solids 103 224-37

    [13] McKie D and McKie C 1986 Essentials of Crystallography (Boston: Blackwell Scientific Publications) pp 113-4

    [14] Hoffman J, Chrzanowska J, Kucharski S, Moscicki T, Mihailescu I N, Ristoscu C and Szymanski Z 2014 The effect of laser wavelength on the ablation rate of carbon Appl. Phys. A 117 395-400

    Yasuhiro Okamoto, Tubasa Okubo, Atsuya Kajitani, Akira Okada. High-quality micro-shape fabrication of monocrystalline diamond by nanosecond pulsed laser and acid cleaning[J]. International Journal of Extreme Manufacturing, 2022, 4(2): 25301
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