ZHAI Lei-ying, XU Jing, ZHONG Shao-long, WU Ya-ming. Driving characteristics of non-overlap vertical electrostatic combdriver for optical translational micromirror[J]. Optics and Precision Engineering, 2012, 20(8): 1772

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- Optics and Precision Engineering
- Vol. 20, Issue 8, 1772 (2012)
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