Yan MA, Jun PENG. Molecular dynamics simulation of AFM scratching on silicon with varying load[J]. Optical Instruments, 2020, 42(2): 57
- Optical Instruments
- Vol. 42, Issue 2, 57 (2020)
Fig. 1. The model of AFM scratching
Fig. 2. The model of AFM probe
Fig. 3. A schematic diagram of the pile distribution
Fig. 4. The pile distribution on different scratching velocity
Fig. 5. The vertical view and lateral view piles distribution on different scratching velocity
Fig. 6. The pile distribution on different probe radius
Fig. 7. The vertical view and lateral view piles distribution on different probe radius
Fig. 8. The wears and tears of probe（r =1 nm）and the deform of probe（r =1.5 nm）
Fig. 9. The pile distribution on different probe wedge angles
Fig. 10. The vertical view and lateral view pile distribution on different probe wedge angles
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