Francesc Caballero-Lucas, Kotaro Obata, Koji Sugioka. Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst)[J]. International Journal of Extreme Manufacturing, 2022, 4(1): 15103

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- International Journal of Extreme Manufacturing
- Vol. 4, Issue 1, 15103 (2022)
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