Research on 3-Ray Automatic Alignment in High Power Excimer Laser MOPA System

Qian Hang; Wang Dahui; Ma Lianying; Zhang Yongsheng; Zhao Xueqing; Zhu Yongxiang; Yi Aiping

doi:10.3788/lop51.101403

Journals >Laser & Optoelectronics Progress >Volume 51 >Issue 10 >Page 101403 > Article

Laser & Optoelectronics Progress
Vol. 51, Issue 10, 101403 (2014)

Research on 3-Ray Automatic Alignment in High Power Excimer Laser MOPA System

Qian Hang^*, Wang Dahui, Ma Lianying, Zhang Yongsheng..., Zhao Xueqing, Zhu Yongxiang and Yi Aiping|Show fewer author(s)

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[in Chinese]

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DOI: 10.3788/lop51.101403 Cite this Article Set citation alerts

Qian Hang, Wang Dahui, Ma Lianying, Zhang Yongsheng, Zhao Xueqing, Zhu Yongxiang, Yi Aiping. Research on 3-Ray Automatic Alignment in High Power Excimer Laser MOPA System[J]. Laser & Optoelectronics Progress, 2014, 51(10): 101403 Copy Citation Text

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Abstract

Automatic alignment of laser beam is an important part of the large laser device. Taking classical imagerelaying unit in an excimer (XeCl) laser master oscillator power-amplifier (MOPA) system as an example, the establishment of alignment benchmark, the automatic alignment principle of 3-ray and charge-coupled device (CCD) image acquisition and processing method are introduced. It has been proved by the experiment results that this alignment unit can appease the request of laser automatic alignment of MOPA system.

Keywords

3-ray automatic alignment lasers master oscillator power-amplifier