LIU Chen, WU Huanchen, HONG Yifei, WANG Faguang, LI Lei. Sensitivity Optimization Method of MEMS Accelerometer Based on Antisymmetric Mode drive[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 723

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- Piezoelectrics & Acoustooptics
- Vol. 45, Issue 5, 723 (2023)
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