A nano-moiré fringe multiplication method is proposed and used to measure nano-deformation of single crystal materials.The lattice structure of single crystal materials is captured by TEM(Transmission Electron Microscope) and acted as a specimen grating.An unidirectional grating fabricated on glass or film is selected as a reference grating.The formation principles of TEM nano-moiré fringe,the relationship between TEM magnification and grating frequency,as well as displacement and strain measurement method ......