A Laminar grating with a 1 000 lp/mm rectangular Laminar groove profile, 13 nm groove depth and a 0.43 duty cycle is fabricated by holographic ion beam etching. The grating is coated by Au in thickness of 40 nm. When the work wavelength is 13.9 nm, the product of the zero order and the first order light diffractions is close to 8.1% at an incident angle of 81.2°, and the diffraction efficiencies of the zero order and the first order are approximately equal. Experimental results illustrate the potential of Laminar grating as a beam splitter at 13.9 nm and also show its efficiency can be higher than 7%.