TIAN Gui, ZHU Jia-qi, HAN Jie-cai, JIANG Chun-zhu, JIA Ze-chun. Effect of Technological Parameters of Sputtering on the Microstructure of Silicon Film Investigated by Raman Analysis[J]. Spectroscopy and Spectral Analysis, 2010, 30(7): 1793

Search by keywords or author
- Spectroscopy and Spectral Analysis
- Vol. 30, Issue 7, 1793 (2010)
Abstract

Set citation alerts for the article
Please enter your email address