The arrayed conical micro-holes are drilled by pulse fiber laser on chemical vapor deposition diamond films. The influence of such parameters as laser scanning speed, scanning times and pulse width on the shape and size of micro-holes are investigated. The results show that the laser scanning speed has less obvious influence on the micro-hole dimension, in contrast, laser scanning times have significant influence on the micro-hole exit diameter. With the increment of laser pulse width, the micro-hole depth and exit diameter both increase, but the micro-hole conical degree decreases.