• Optics and Precision Engineering
  • Vol. 30, Issue 21, 2688 (2022)
Jun YU, Zhanshan WANG*, Qiushi HUANG, Zhong ZHANG..., Zhenxiang SHEN, Hongfei JIAO, Pengfeng SHENG, Jingjing XIA and Yifan WANG|Show fewer author(s)
Author Affiliations
  • Institute of Precision Optical Engineering, MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai Frontiers Science Center of Digital Optics, Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, School of Physics Science and Engineering, Tongji University, Shanghai200092, China
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    DOI: 10.37188/OPE.20223021.2688 Cite this Article
    Jun YU, Zhanshan WANG, Qiushi HUANG, Zhong ZHANG, Zhenxiang SHEN, Hongfei JIAO, Pengfeng SHENG, Jingjing XIA, Yifan WANG. Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J]. Optics and Precision Engineering, 2022, 30(21): 2688 Copy Citation Text show less

    Abstract

    High-precision extreme ultraviolet and X-ray observations for space exploration require the development of advanced micro materials for the numerous high-precision optical reflection elements used in such observations. Because short wavelengths are more prone to scattering on optical surfaces, the precision requirements and the fabrication techniques of short-wavelength optical components differ significantly from those of long-wavelength optical components. The Institute of Precision Optical Engineering (IPOE) at Tongji University has 20 years of research experience in this field. We have built a high-accuracy fabrication and measurement platform based on short-wavelength mirrors, developed an ion beam configuration of an ultra-smooth aspheric surface, proposed an absolute measurement method using random off-axis rotation based on Zernike polynomials, and formed a complete technology chain to develop aspheric reflector substrates. These optical components and systems have been successfully applied at several short-wavelength science facilities both in China and abroad. This study will briefly introduce the recent research progress on these optical aspheric reflectors at the IPOE.
    Jun YU, Zhanshan WANG, Qiushi HUANG, Zhong ZHANG, Zhenxiang SHEN, Hongfei JIAO, Pengfeng SHENG, Jingjing XIA, Yifan WANG. Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J]. Optics and Precision Engineering, 2022, 30(21): 2688
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