• Optics and Precision Engineering
  • Vol. 31, Issue 18, 2656 (2023)
Jun ZHANG, Tiantian ZHEN*, Jiale CAI, Mengtong LI, and Yuting LIU
Author Affiliations
  • State Key Laboratory of High-Performance Precision Manufacturing,Dalian University of Technology, Dalian116000, China
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    DOI: 10.37188/OPE.20233118.2656 Cite this Article
    Jun ZHANG, Tiantian ZHEN, Jiale CAI, Mengtong LI, Yuting LIU. Sensitivity laws and prediction of piezoelectric force sensors at different loading points[J]. Optics and Precision Engineering, 2023, 31(18): 2656 Copy Citation Text show less
    Structure of eight-pivot piezoelectric
    Fig. 1. Structure of eight-pivot piezoelectric
    Schematic diagram of the force geometry of dynamometer
    Fig. 2. Schematic diagram of the force geometry of dynamometer
    Schematic diagram of main loading point
    Fig. 3. Schematic diagram of main loading point
    Experimental device and signal transmission process
    Fig. 4. Experimental device and signal transmission process
    Schematic diagram of sensitivity experimental
    Fig. 5. Schematic diagram of sensitivity experimental
    Schematic diagram of lateral loading point
    Fig. 6. Schematic diagram of lateral loading point
    Schematic diagram of lateral loading point
    Fig. 7. Schematic diagram of lateral loading point
    Flowchart of changed position sensitivity prediction
    Fig. 8. Flowchart of changed position sensitivity prediction
    Prediction of main direction sensitivity
    Fig. 9. Prediction of main direction sensitivity
    Prediction of lateral direction sensitivity
    Fig. 10. Prediction of lateral direction sensitivity
    Prediction deviation and standard deviation of sensitivity
    Fig. 11. Prediction deviation and standard deviation of sensitivity
    Coordinate/mm-100-50050100
    1003.983.743.853.863.82
    503.883.943.833.813.80
    03.843.843.923.823.82
    -503.883.893.873.793.79
    -1003.833.813.843.783.76
    Table 1. Sensitivity of dynamometer with changed position
    Loading positionX1X2X3X4X5
    Sensitivity/(mV·N-17.827.998.088.178.29
    Table 2. Sensitivity of dynamometer with changed position
    Loading position"Y1Y2Y3Y4Y5
    Sensitivity/(mV·N-17.978.067.817.907.88
    Table 3. Sensitivity of dynamometer with changed position
    Loading directionXYZ
    Computational error /%8.69.312.4
    Standard deviation of the error1.861.772.61
    Table 4. Calculation error and standard deviation of sensitivity
    Optimization methodGAACOGWO
    e/%σe/%σe/%σ
    X5.132.803.762.632.721.03
    Y3.203.056.807.131.972.12
    Z0.610.370.860.470.470.25
    Table 5. Prediction deviation and standard deviation of sensitivity
    Jun ZHANG, Tiantian ZHEN, Jiale CAI, Mengtong LI, Yuting LIU. Sensitivity laws and prediction of piezoelectric force sensors at different loading points[J]. Optics and Precision Engineering, 2023, 31(18): 2656
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