• Optics and Precision Engineering
  • Vol. 17, Issue 10, 2465 (2009)
XING Yu-mei1,2,*, HUI Chun1, XU Ai-lan3, LI Gang4..., ZHAO Jian-long4 and REN Qiu-shi1|Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: Cite this Article
    XING Yu-mei, HUI Chun, XU Ai-lan, LI Gang, ZHAO Jian-long, REN Qiu-shi. Microfabrication of multichannel flexible neural microelectrodes[J]. Optics and Precision Engineering, 2009, 17(10): 2465 Copy Citation Text show less

    Abstract

    Multichannel flexible neural microelectrodes were designed and fabricated,and their fabrication processes were also studied. A microfabrication technology was introduced to manufacture flexible microelectrodes based on a new flexible substrate material, parylene C, due to its excellent electrical insulating, mechanical and biocompatible properties,and a 36-channel flexible neural microelectrode was fabricated with the arrangement in a 6×6 square grid pattern. The size of microelectrode was Φ150 μm (circular) and 150 μm×150 μm (squre), respectively,and the line width of metal trace was 30 μm. It was found that the microelectrode shows a smooth surface and a distinct outline.A electrtical test indicates that the impedance of microelectrode is only 7 kΩ or so, and it reduceds as frequency increasing, which is an excellent high-pass behavior.Moreover, the microelectrode and a flexible substrate can be integrated by the microfabrication technology.The microelectrode is suitable for the application in retinal prostheses, for it has a good quality and excellent electrical properties.
    XING Yu-mei, HUI Chun, XU Ai-lan, LI Gang, ZHAO Jian-long, REN Qiu-shi. Microfabrication of multichannel flexible neural microelectrodes[J]. Optics and Precision Engineering, 2009, 17(10): 2465
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