Weak light detector has very important application in medicine, space exploration field, etc. As a kind of weak light detector, silicon photon multiplier(SiPM) possesses excellent performance. SiPM with bulk integrated quenching resistor which is developed at novel device laboratory (NDL), has a strong ability of single photon detection. Aimed at improving the photo detection efficiency(PDE) of bulk integrated quenching resistor SiPM in the blue violet region(360~420 nm), the thesis presents a kind of deep trench isolation SiPM. The structure of the device is optimized through the simulation, and the preliminary experimental results have been obtained.