1Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2College of Materials Science and Opto-electronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China
3Beijing Huairou Instruments and Sensors Co., Ltd., Beijing 101400, China
4Beijing Institute of Automation and Control Equipment, Key Laboratory of National Defense Science and Technology of Inertial Technology, Beijing 100074, China