In order to depth study transmission characteristics of surface plasmon polariton based on strip structure, surface plasmon polariton excitation was achieved by using grating coupling. The transmission characteristics which is relation to film thickness and incident angle were obtained though adopting to change he metal film thickness and angle of incident light. The results show that reduction of the metal film thickness will result in rapid transmission bandwidth reduction to a lower transmission rate. Moreover, the incident light angle changes as the efficiency of light transmission varies. The results are significant of nanoplasma polarization couple of semiconductor equipment research.