1Engineering Research Center of Precision Photonics Integration and System Application, Ministry of Education & Key Laboratory of Intelligent Optical Sensing and Manipulation, Ministry of Education & National Laboratory of Solid State Microstructures & College of Engineering and Applied Sciences & Institute of Optical Communication Engineering & Nanjing University-Tongding Joint Lab for Large-scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
2College of Electronics and Optical Engineering and College of Flexible Electronics (Future Technology), Nanjing University of Posts and Telecommunications, Nanjing 210023, China
3The 41st Research Institute of China Electronics Technology Group Corp, Qingdao 266000, China