Research Progress in Laser Surface Polishing of Hard and Brittle Materials

Yifan Xu; Jingzhen Shao; Ying Lin; Yangjie Shi; Xu Liang

doi:10.3788/LOP202259.1300003

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 13 >Page 1300003 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 13, 1300003 (2022)

Research Progress in Laser Surface Polishing of Hard and Brittle Materials

Yifan Xu^1,2, Jingzhen Shao¹, Ying Lin¹, Yangjie Shi^1,2, and Xu Liang^1,*

Author Affiliations

¹Anhui Institute of Optics and Fine Mechanics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, Anhui , China

²University of Science and Technology of China, Hefei 230026, Anhui , China

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DOI: 10.3788/LOP202259.1300003 Cite this Article Set citation alerts

Yifan Xu, Jingzhen Shao, Ying Lin, Yangjie Shi, Xu Liang. Research Progress in Laser Surface Polishing of Hard and Brittle Materials[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1300003 Copy Citation Text

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Abstract

Laser polishing technology has the advantages of non-contact processing, no mechanical stress, high polishing accuracy, etc. It is especially suitable for surface processing of brittle and hard materials. This article describes the characteristics and mechanism of laser polishing process, introduces the influence of various parameters in laser polishing process on processing quality, and reviews the research results and current status of laser polishing technology for hard and brittle materials in various countries. The difference and characteristics of laser hot polishing and laser cold polishing, as well as the polishing principle and research progress are emphatically introduced.

Keywords

hard and brittle materials laser polishing materials photochemical effect thermal effect

E_{i} = \frac{T_{0} (t) (1 + \sqrt[]{\frac{π α t}{4}} \frac{A_{0}}{V_{0}}) + \frac{L_{f} + L_{v}}{c}}{\frac{A k_{1}}{ρ c} \frac{A_{0}}{V_{0}}} = \frac{T_{0} (t) ρ c}{\frac{A_{0}}{V_{0}} A k_{1}} + \frac{T_{0} (t) ρ c}{A k_{1}} \sqrt[]{\frac{π α t}{4}} + \frac{(L_{f} + L_{v}) ρ}{A k_{1} \frac{A_{0}}{V_{0}}}

，（1）

Φ x = Φ_{i n c} e x p (- α X)

，（2）

Yifan Xu, Jingzhen Shao, Ying Lin, Yangjie Shi, Xu Liang. Research Progress in Laser Surface Polishing of Hard and Brittle Materials[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1300003

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