• Optics and Precision Engineering
  • Vol. 30, Issue 16, 1924 (2022)
Jie TAN, Shibin LIU*, Jiezhang LUO, Yinghao CHEN, and Yongqian Du
Author Affiliations
  • School of Electronics and Information, Northwestern Polytechnical University, Xi'an710072, China
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    DOI: 10.37188/OPE.20223016.1924 Cite this Article
    Jie TAN, Shibin LIU, Jiezhang LUO, Yinghao CHEN, Yongqian Du. Research progress of light addressable potentiometric sensor with optimized structure[J]. Optics and Precision Engineering, 2022, 30(16): 1924 Copy Citation Text show less
    Structure and working principle of LAPS
    Fig. 1. Structure and working principle of LAPS
    Setup picture of ultra-high speed chemical imaging system based on analog micromirror[29]
    Fig. 2. Setup picture of ultra-high speed chemical imaging system based on analog micromirror29
    Optimization of LAPS with porous insulator[62]
    Fig. 3. Optimization of LAPS with porous insulator62
    Comparison of LAPS with anodic oxidized insulator and LAPS with thermal oxidized insulator[64]
    Fig. 4. Comparison of LAPS with anodic oxidized insulator and LAPS with thermal oxidized insulator64
    Normalized photocurrent line scan curves across SU-8 edge using SOS substrate with undecylenic acid grafted onto silicon layers with different thickness[65-66]
    Fig. 5. Normalized photocurrent line scan curves across SU-8 edge using SOS substrate with undecylenic acid grafted onto silicon layers with different thickness65-66
    Performance test of LAPS fabricated by ICP-RIE[82]
    Fig. 6. Performance test of LAPS fabricated by ICP-RIE82
    Chemical image and spatial resolution of LAPS using InGaN/GaN as a semiconductor layer[89]
    Fig. 7. Chemical image and spatial resolution of LAPS using InGaN/GaN as a semiconductor layer89
    Comparison of chemical imaging of LAPS with honeycomb meshed working electrodes and LAPS with the flat working electrodes[96]
    Fig. 8. Comparison of chemical imaging of LAPS with honeycomb meshed working electrodes and LAPS with the flat working electrodes96
    Performance test of ES-LAPS using ITO as the semiconductor layer[97]
    Fig. 9. Performance test of ES-LAPS using ITO as the semiconductor layer97
    Time-lapse photocurrent images of B50 cells exposed to 0.01% TX-100 in S-HEPES buffer[101]
    Fig. 10. Time-lapse photocurrent images of B50 cells exposed to 0.01% TX-100 in S-HEPES buffer101
    绝缘层制备工艺结构灵敏度/(mV·pH-1光电流对比度文献
    阳极氧化法Si3N4/SiO2/Si5936264
    自组装有机单层膜修饰SiO2/Si301265-66
    Table 1. Important research results of LAPS in insulator optimization
    方法半导体类型半导体厚度/μm灵敏度/(mV·pH-1空间分辨率/μm文献
    KOH的各向异性湿法刻蚀P-Si17555.215074-75
    深反应离子刻蚀P-Si10067.0910076
    TMAH的湿法刻蚀N-Si27045.36-78
    电感耦合等离子体刻蚀P-Si106-582
    Table 2. Important research results of optimization of LAPS using silicon as the semiconductor layer
    半导体材料少数载流子扩散长度/μm光电流幅值/μA灵敏度/(mV·pH-1空间分辨率/μm文献
    非晶硅<0.12--183-84
    砷化镓3.1--385
    氮化镓0.28-52.29486
    IGZO--61.8587
    SnOx-1.2957.6-88
    InGaN/GaN---789
    Table 3. Important research results of optimization of LAPS using non-silicon as the semiconductor layer
    电极技术优势文献
    低阻抗的参比电极降低检测点之间串扰91
    三电极降低检测点之间串扰91
    参比电极+旁路电容提高小pH变化时的检测能力92
    肖特基接触的背面工作电极提高空间分辨率94
    紫外光刻技术制备的网状工作电极稳定输出光电流信号80
    胶体球光刻技术制备的蜂巢网状工作电极提高空间分辨率,降低平带电压在平面内分布误差95-96
    Table 4. Important research results of LAPS in electrodes optimization
    半导体材料最大可用调制频率/Hz空间分辨率/μm用途文献
    ITO102.3味觉传感,单细胞表面电荷成像[97-98],[11
    碳点10仅受聚焦光斑大小决定细胞表面吸附成像99
    氧化锌纳米棒1003酶α-胰凝乳蛋白酶的聚(酯酰胺)薄膜降解100
    赤铁矿1000<2.3多个细胞进行快速动态功能成像101
    Table 5. Important research results of ES-LAPS
    Jie TAN, Shibin LIU, Jiezhang LUO, Yinghao CHEN, Yongqian Du. Research progress of light addressable potentiometric sensor with optimized structure[J]. Optics and Precision Engineering, 2022, 30(16): 1924
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