HUANG Qiang-xian, YU Fu-ling, GONG Er-min, WANG Chen-chen, FEI Ye-tai. Nano-CMM stage with zero Abbe error and its error analysis[J]. Optics and Precision Engineering, 2013, 21(3): 664

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- Optics and Precision Engineering
- Vol. 21, Issue 3, 664 (2013)
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