[1] CHAO W L, HARTENECK B D, LIDDLE J A, et al.. Soft X-ray microscopy at a spatial resolution better than 15nm [J]. Nature, 2005,435:1210-1213.

[2] CHU Y S, YI J M, CARLO F D, et al.. Hard-X-ray microscope with Fresnel zone plates reach 40nm Rayleigh resolution [J]. Applied Physics Letters, 2008,92:103-119.

[3] CHEN J, WU C Y,TIAN J P, et al.. Three-dimensional imaging of a complex concaved cuboctahedron copper sulfide crystal by X-ray nanotomography [J]. Applied Physics Letters, 2008,92:233104.

[4] KITCHENA M J, PAGANINA D, LEWISA R A, et al.. Analysis of speckle patterns in phase-contrast images of lung tissue [J]. Nuclear Instruments and Methods in Physics Research A, 20055,48:240-246.

[5] TIMM W, ANA D, CHRISTIAN D, et al.. X-ray phase imaging with a grating interferometer [J]. Optics Express, 2005,13(16):6296-6304.

[6] BAYINHESHIG, GAO J X, QI X D. Manufacturing for ruling concave metal grating with a long focal length [J]. Opt. Precision Eng., 2006,14(3):391-395. (in Chinese)

[7] ZHAO B, Q I X D. Manufacturing of high efficient holographic diffraction gratings [J]. Opt. Precision Eng., 2001,9(2):109-114. (in Chinese)

[8] WU W J, WANG ZH SH, QIN SH J, et al.. Etching of multiplayer grating using a narrow spectral band X-ray [J]. Opt. Precision Eng., 2004,12(2):226-230. (in Chinese)

[9] XU X D, HONG Y L, TIAN Y C, et al.. Fabrication of self-supporting transmission gratings for plasma diagnostics [J]. SPIE, 1999,3766:380-385.

[10] KLEY E B, PARRIAUX O. E-beam tandem writes short-pitch DOEs and gratings for EU2922 FOTA and other optical Microsystems [J]. SPIE, 1996,2783:146-153.

[11] SOLAK H H, DAVID C, GOBRECHT J, et al.. Sub-50nm period patterns with EUV interference lithography [J]. Microelectron Eng, 2003,67/68:56-62.

[12] ZHU X L, WANG D Q, XIE C Q, et al.. Fabrication of X-ray diffractive optical elements for ICF target diagnosis [J]. SPIE, 2007,6722:672208.

[13] ZHU X L, XIE C Q, YE T C, et al.. Fabrication of 200 nm period X-ray transmission gratings using electron beam lithography [J]. SPIE,2007,6832:68320V