• Chinese Optics Letters
  • Vol. 18, Issue 9, 093201 (2020)
Kaiqiang Cao1,2, Long Chen1, Ke Cheng1, Zhenrong Sun1, and Tianqing Jia1,2,*
Author Affiliations
  • 1State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
  • 2Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
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    DOI: 10.3788/COL202018.093201 Cite this Article Set citation alerts
    Kaiqiang Cao, Long Chen, Ke Cheng, Zhenrong Sun, Tianqing Jia, "Regular uniform large-area subwavelength nanogratings fabricated by the interference of two femtosecond laser beams via cylindrical lens," Chin. Opt. Lett. 18, 093201 (2020) Copy Citation Text show less

    Abstract

    Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings (RUSNGs) on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors (including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.
    Kaiqiang Cao, Long Chen, Ke Cheng, Zhenrong Sun, Tianqing Jia, "Regular uniform large-area subwavelength nanogratings fabricated by the interference of two femtosecond laser beams via cylindrical lens," Chin. Opt. Lett. 18, 093201 (2020)
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