• International Journal of Extreme Manufacturing
  • Vol. 6, Issue 3, 35501 (2024)
Wenyu Chen1, Shiyuan Liu1,2, and Jinlong Zhu1,2,*
Author Affiliations
  • 1State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, People’s Republic of China
  • 2Optics Valley Laboratory, Wuhan, Hubei 430074, People’s Republic of China
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    DOI: 10.1088/2631-7990/ad2c60 Cite this Article
    Wenyu Chen, Shiyuan Liu, Jinlong Zhu. Pixelated non-volatile programmable photonic integrated circuits with 20-level intermediate states[J]. International Journal of Extreme Manufacturing, 2024, 6(3): 35501 Copy Citation Text show less

    Abstract

    Multi-level programmable photonic integrated circuits (PICs) and optical metasurfaces have gained widespread attention in many fields, such as neuromorphic photonics, optical communications, and quantum information. In this paper, we propose pixelated programmable Si3N4 PICs with record-high 20-level intermediate states at 785 nm wavelength. Such flexibility in phase or amplitude modulation is achieved by a programmable Sb2S3 matrix, the footprint of whose elements can be as small as 1.2 μm, limited only by the optical diffraction limit of an in-house developed pulsed laser writing system. We believe our work lays the foundation for laser-writing ultra-high-level (20 levels and even more) programmable photonic systems and metasurfaces based on phase change materials, which could catalyze diverse applications such as programmable neuromorphic photonics, biosensing, optical computing, photonic quantum computing, and reconfigurable metasurfaces.
    Wenyu Chen, Shiyuan Liu, Jinlong Zhu. Pixelated non-volatile programmable photonic integrated circuits with 20-level intermediate states[J]. International Journal of Extreme Manufacturing, 2024, 6(3): 35501
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