The one-port resonator and SAW filter were developed by using the SOI substrate with 42°Y-X LiTaO3/SiO2/Si structure and optimizing design such as suppression of the transverse mode. The testing results show that the resonant frequency of resonator is 1.5 GHz, the Bode Q value is as high as 4 000. The center frequency of SAW filter is 1 370 MHz, and the insertion loss is -1.2 dB. The bandwidth of 1 dB is 74 MHz, and the relative bandwidth is 5.4%. The stop-band rejection is more than 40 dB, and the temperature coefficient is better than -9×10-6/℃ at -55~+85 ℃. The product has the characteristics of high frequency, wide bandwidth, low loss, low temperature drift and high stop-band rejection, and its performance specifications are excellent and has good practicability.