Zhe ZHANG, Mingyu LI, Zehua XIAO, Lun PAN, Sheng BAO, Zhiping YANG, Qiushun LI. The chip of temperature sensor based on spatial optical coupling system[J]. Optical Instruments, 2023, 45(5): 79
- Optical Instruments
- Vol. 45, Issue 5, 79 (2023)
Fig. 1. Diffraction vector of grating coupler
Fig. 2. The structure of grating coupler
Fig. 3. Electric field and coupling efficiency of grating coupler
Fig. 4. Design diagram of optical path system
Fig. 5. Transverse ray fan plot and Spot diagram of optical system
Fig. 6. Experimental optical and mechanical system and micro-nano sensing chip partial structure
Fig. 7. Spectral scan of the space optical system through the chip pass terminal
Fig. 8. Comparison of single-loop transmission spectrum between optical system and optical array in the same structure
Fig. 9. Transmission spectrum sampling diagram of temperature sensing test
Fig. 10. Fitting curve of the central wavelength of transmission spectrum as a function of temperature
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