SHEN Su, ZHOU Lei, WEI Guo-jun, CHEN Lin-sen. Design of distributed micro-area micro/nano-imprinting lithographic system[J]. Optics and Precision Engineering, 2009, 17(4): 807

Search by keywords or author
- Optics and Precision Engineering
- Vol. 17, Issue 4, 807 (2009)
Abstract

Set citation alerts for the article
Please enter your email address