• Piezoelectrics & Acoustooptics
  • Vol. 42, Issue 4, 448 (2020)
JIAN Ke, SHUAI Yao, TIAN Benlang, BAI Xiaoyuan..., LUO Wenbo, WU Chuangui and ZHANG Wanli|Show fewer author(s)
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    DOI: 10.11977/j.issn.1004-2474.2020.04.004 Cite this Article
    JIAN Ke, SHUAI Yao, TIAN Benlang, BAI Xiaoyuan, LUO Wenbo, WU Chuangui, ZHANG Wanli. Study on Frequency and Temperature Characteristics of Single Crystal Thin Film Bulk Acoustic Resonators[J]. Piezoelectrics & Acoustooptics, 2020, 42(4): 448 Copy Citation Text show less

    Abstract

    The 43°Y-cut lithium niobate single crystal piezoelectric thin film was prepared by ion implantation transferring method, and the solid-state acoustic reflective thin film bulk acoustic device was prepared with SiO2/Mo as the acoustic reflection structure. The operating frequency of the resonator is at 3 GHz, and the equivalent electromechanical coupling coefficient of LN film is 14.15%. The frequency and temperature characteristic of the resonator is characterized. The results show that although the frequency temperature coefficient of LN single crystal is between (-70~-90)×10-6/℃, the frequency temperature coefficient of the resonator is reduced to -18×10-6/℃ because the acoustic reflection structure contains a SiO2 layer with positive temperature coefficient, which shows that the solid acoustic reflection structure can effectively suppress the temperature drift of LN single crystal thin film and obtain a resonator with low frequency temperature coefficient.
    JIAN Ke, SHUAI Yao, TIAN Benlang, BAI Xiaoyuan, LUO Wenbo, WU Chuangui, ZHANG Wanli. Study on Frequency and Temperature Characteristics of Single Crystal Thin Film Bulk Acoustic Resonators[J]. Piezoelectrics & Acoustooptics, 2020, 42(4): 448
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