In order to further expand the functional characteristics of micro nano periodic superstructure and meet the high-precision design requirements of optical periodic superstructure，based on the Multi-resolution Time-domain Method（MRTD）， starting from Maxwell equation and deducing the surface composite scattering field of the micro-nano three-dimensional hemispheric optical periodic structure， a good agreement is presented when the calculation results are compared with the results of the FDTD method. The surface field distribution of the mico-nano three-dimensional hemispheric optical periodic structure is given and the differential scattering cross section of mico-nano three-dimensional hemispheric optical periodic structure is numerically calculated. The influence of the filling material， hemisphere size， hemispheric distance and other parameters on the surface scattering field is simulated and analyzed. The following conclusions are obtained： the electric field distribution under P polarization could highlight the surface structure unit profile of periodic structure； the scattering field increases with the incident angle， and gradually decreases in the direction of the mirror scattering angle； the peak number of the scattering field of filled unit is consistent with the number of filling units in the detection range when the radius and wavelength values are equivalent； with the increase of the filling hemisphere distance， the maximum value of the scattering field increases successively， and the angle interval corresponding to the maximum value decreases sequentially.