• Optics and Precision Engineering
  • Vol. 18, Issue 8, 1801 (2010)
CUI Tian-gang1,2,*, WANG Yong-gang1,2, MA Dong-mei1, MA Wen-sheng1, and CHEN Bo1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    CUI Tian-gang, WANG Yong-gang, MA Dong-mei, MA Wen-sheng, CHEN Bo. Design of online measuring device for surface profile of Wolter Type I mirror[J]. Optics and Precision Engineering, 2010, 18(8): 1801 Copy Citation Text show less

    Abstract

    As traditional interference-based measurements can not be suited to measure the surface profile of the Wolter Type I revolving aspheric mirror, a new method was proposed to measure this kind of mirror in this paper. On the basis of a Long Trace Profiler (LTP), a new measuring device was also established by introducing a pentaprism into the scanning mechanism for ray turning. The working principles, structure parameters and data processing algorithms of the device were investigated, then a standard plane mirror was used as the reference to calibrate the device. Finally, a mirror sample was measured to verify the measuring device. Experimental results indicate that designed device can achieve the slope error of RMS 6.7 μrad , repeatability of 0.75 μrad and the height profiles of PV 0.24λ and RMS 0.07λ, which meets the design requirements basically.
    CUI Tian-gang, WANG Yong-gang, MA Dong-mei, MA Wen-sheng, CHEN Bo. Design of online measuring device for surface profile of Wolter Type I mirror[J]. Optics and Precision Engineering, 2010, 18(8): 1801
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